| 類型 | 1000 ... 500 Torr / mbar | 200 ... 1 Torr / mbar |
| 精度 (1) | % of reading | 0.4 | 0.4 |
| 溫度效應(yīng) | | |
| 零點 | percent FS/°C | 0.005 | 0.005 |
| 滿量程 | % of reading / °C | 0.02 | 0.02 |
| 壓力，大 | kPa (absolute) | 400 | 260 |
| 分辨率 | percent FS | 0.003 | 0.003 |
| 低讀數(shù) | percent FS | 0.01 | 0.01 |
| 建議的低讀數(shù) | percent FS | 0.05 | 0.05 |
| 建議的低控制壓力 | percent FS | 0.5 | 0.5 |
| 溫度 | | |
| 運行（室內(nèi)環(huán)境）(4) | °C | +10 … +50 | |
| 在法蘭處烘烤 | °C | ≤200 | ≤200 |
| 貯存 | °C | –40 … +65 | –40 … +65 |
| 電源電壓 | | +21 … +30 V DC or ±15 V (±5%) | +21 … +30 V DC or ±15 V (±5%) |
| 功耗 | | |
| 加熱時 | W | ≤25 | ≤25 |
| 運行溫度 | W | ≤18 | ≤18 |
| 輸出信號（模擬） | V (dc) | 0 … +10 | 0 … +10 |
| 反應(yīng)時間 (2) | ms | 30 | 30 |
| 保護等級 | | IP 40 | IP 40 |
| 標(biāo)準(zhǔn) | | |
| CE 合規(guī) | | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS |
| ETL 認(rèn)證 | | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 |
| SEMI 合規(guī) | | SEMI S2 | SEMI S2 |
| 電氣連接 | | D-Sub, 15-pin, male | D-Sub, 15-pin, male |
| 設(shè)定點 | | |
| 設(shè)定點數(shù)量 | | 2 (SP1,SP2) | 2 (SP1,SP2) |
| 繼電器觸點 | | ≤30 | ≤30 |
| 滯后 | percent FS | 1 | 1 |
| 診斷端口 | | |
| 協(xié)議 | | RS232-C | RS232-C |
| 讀數(shù) | | pressure, status, ID | pressure, status, ID |
| 設(shè)置 | | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
| 暴露于真空的材料 | | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3)) |
| 內(nèi)部容積 | | |
| 內(nèi)部容積 1/2'' 管 | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| 內(nèi)部容積 DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| 內(nèi)部容積 DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| 內(nèi)部容積 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) |
| 重量 | | |
| 重量 1/2'' 管 | g | 837 | 837 |
| 重量 DN 16 ISO KF | g | 852 | 852 |
| 重量 DN 16 CF-R | g | 875 | 875 |
| 重量 8 VCR® | g | 897 | 897 |
| EtherCAT | | |
| 協(xié)議 EtherCAT | | protocol specialized for EtherCAT | protocol specialized for EtherCAT |
| 通訊標(biāo)準(zhǔn) | | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge |
| 節(jié)點地址 | | Explicit Device Identification | Explicit Device Identification |
| 物理層 | | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) |
| 數(shù)字功能讀取 | | pressure, status, ID | pressure, status, ID |
| 數(shù)字功能設(shè)置 | | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
| (CoE) | | SDO requests, responses and information | SDO requests, responses and information |
| 過程數(shù)據(jù) | | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping |
| EtherCAT 連接器 | | 2 x RJ45, 8-pin (socket), IN and OUT | 2 x RJ45, 8-pin (socket), IN and OUT |
| 電纜 | | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher |
| 電纜長度 | m (ft.) | ≤100 (330) | ≤100 (330) |
| Signal processing time | ms | 2 | 2 |
| DeviceNet™ | | |
| 協(xié)議 | | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only |
| 數(shù)據(jù)率 | kBaud | 125, 250, 500 by switch or network programmable | 125, 250, 500 by switch or network programmable |
| 電纜長度 125 kbps | m (ft.) | 500 (1650) | 500 (1650) |
| 電纜長度 250 kbps | m (ft.) | 250 (825) | 250 (825) |
| 電纜長度 500 kbps | m (ft.) | 100 (330) | 100 (330) |
| MAC ID | | address 00 - 63 by switch or network programmable | address 00 - 63 by switch or network programmable |
| 數(shù)字功能讀取 | | pressure, status, ID | pressure, status, ID |
| 數(shù)字功能設(shè)置 | | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
| 技術(shù)規(guī)格 | | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) |
| 設(shè)備類型 | | ''VG'' vacuum gauge | ''VG'' vacuum gauge |
| I / O 從屬傳訊 | | polling only | polling only |
| 真空計 D 型連接器的電源電壓 | | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W |
| 為微型連接器上的 DeviceNet 收發(fā)器提供電壓 | | 24 V nom / <2 w="" (11="" …="" 25=""> | 24 V nom / <2 w="" (11="" …="" 25=""> |
| DeviceNet™ 連接器 | | microstyle, 5 pin, male | microstyle, 5 pin, male |
| CDG（模擬輸出、CDG 電源電壓、設(shè)定點）連接器 | | D-sub, 15 pin, male | D-sub, 15 pin, male |
| Profibus DP | | |
| 波特率 | | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
| 地址 | | address 00 - 125 by switch or network programmable | address 00 - 125 by switch or network programmable |
| 數(shù)字功能讀取 | | pressure, status, ID | pressure, status, ID |
| 數(shù)字功能設(shè)置 | | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
| Profibus DP 連接器 | | D-sub, 9 pin, female | D-sub, 9 pin, female |
| CDG（模擬輸出、電源電壓、設(shè)定點）連接器 | | D-sub, 15 pin, male | D-sub, 15 pin, male |
